Nano/Micro-Mechanical and Tribological Characterization of Ar, C, N, and Ne Ion-Implanted Si

Author(s)

Zhi-Hui Xu
Young-Bae Park
Xiaodong Li, University of South Carolina - ColumbiaFollow

Document Type

Article

Publication Info

Published in Journal of Materials Research, Volume 25, Issue 5, 2010, pages 880-889.

Rights

©Journal of Materials Research 2010, Cambridge University Press.

Xu, Z-H., Park, Y-B., & Li, X. (May 2010). Nano/Micro-Mechanical and Tribological Characterization of Ar, C, N, and Ne Ion-Implanted Si. Journal of Materials Research, 25 (5), 880 – 889. http://dx.doi.org/10.1557/JMR.2010.0117