Microstructural Characterization of N, Ti Mixed Coatings Deposited by Plasma Based Ion Implantation and Magnetron Sputtering Deposition

Author(s)

Xinxin Ma
Renchao Che
Mingren Sun
Yue Sun
Lifang Xia
Xiaodong Li, University of South Carolina - ColumbiaFollow

Document Type

Article

Publication Info

Published in Journal of Materials Science Letters, Volume 19, Issue 8, 2000, pages 635-638.

(c) Springer, 2000

Ma, X., Che, R., Su, M., Sun, Y., Xia, L., & Li, X. (2000). Microstructural Characterization of N, Ti Mixed Coatings Deposited by Plasma Based Ion Implantation and Magnetron Sputtering Deposition. Journal of Materials Science Letters, 19(8): 635-638.

http://dx.doi.org/10.1023/A:1006790006750

Rights

(c) Springer, 2000

Ma, X., Che, R., Su, M., Sun, Y., Xia, L., & Li, X. (2000). Microstructural Characterization of N, Ti Mixed Coatings Deposited by Plasma Based Ion Implantation and Magnetron Sputtering Deposition. Journal of Materials Science Letters, 19(8): 635-638.

http://dx.doi.org/10.1023/A:1006790006750