Ultra-Thin Microporous–Mesoporous Metal Oxide Films Prepared by Molecular Layer Deposition (MLD)

Author(s)

X. Liang
Miao Yu, University of South Carolina - ColumbiaFollow
J. Li
Y.-B. Jiang
A. W. Weimer

Document Type

Article

Subject Area(s)

Chemistry, Chemical Engineering, Materials Chemistry

Publication Info

Published in Chemical Communications, Issue 46, 2009, pages 7140-7142.

Rights

© Chemical Communications 2009, Royal Society of Chemistry

Liang, X., Yu, M., Li, J., Jiang, Y.-B., & Weimer, A. W. (2009). Ultra-thin microporous-mesoporous metal oxide films prepared by molecular layer deposition (MLD). Chemical Communications, 46, 7140-7142.

http://dx.doi.org/10.1039/B911888H