An Infrared Imaging Method for High-Throughput Combinatorial Investigation of Hydrogenation-Dehydrogenation and New Phase Formation of Thin Films

Author(s)

H. Oguchi
Jason R. Hattrick-Simpers, University of South Carolina - ColumbiaFollow
I. Takeuchi
E. J. Heilweil
L. A. Bendersky

Document Type

Article

Abstract

We have developed an infrared imaging setup enabling in situ infrared images to be acquired, and expanded on capabilities of an infrared imaging as a high-throughput screening technique, determination of a critical thickness of a Pd capping layer which significantly blocks infrared emission from below, enhancement of sensitivity to hydrogenation and dehydrogenation by normalizing raw infrared intensity of a Mg thin film to an inert reference, rapid and systematic screening of hydrogenation and dehydrogenation properties of a Mg–Ni composition spread covered by a thickness gradient Pd capping layer, and detection of formation of a Mg₂Si phase in a Mg thin film on a thermally oxidized Si substrate during annealing.

Publication Info

Published in Review of Scientific Instruments, Volume 80, Issue 7, 2009, pages #073707-.

Rights

©Review of Scientific Instruments 2009, AIP (American Institute of Physics).

Oguchi, H., Hattrick-Simpers, J., Takeuchi, I., Geilweil, E. J., & Bendersky, L. A. (July 2009). An Infrared Imaging Method for High-Throughput Combinatorial Investigation of Hydrogenation-Dehydrogenation and New Phase Formation of Thin Films. Review of Scientific Instruments, 80 (7), #073707. http://dx.doi.org/10.1063/1.3184024