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The probability distributions for switching out of the superconducting state of low-cur-rent-density 1-μm Nb Josephson junctions with capacitance ≈ 0.1 pF have been measured as a function of temperature T down to 3 mK. Below 100 mK the distribution widths become independent of T. The results are in excellent agreement with predictions for the quantum tunneling of the (macroscopic) junction phase that include the reduction of tunneling rates due to dissipation.

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