Direct Nanomechanical Machining of Gold Nanowires Using a Nanoindenter and an Atomic Force Microscope
Nanomechanical characterization of gold nanowires with a height of 160 nm, width of 350 nm and length of 5 µm has been carried out. Hardness and elastic modulus of the unreleased wires were measured by nanoindentation techniques using a nanoindenter. Post-fabrication mechanical machining of the gold nanowires is demonstrated. An array of nanoscale indents was successfully made on the gold nanowires. Nanochannels, nanoslots and complex nanopatterns were fabricated on a single gold nanowire by directly scratching/sliding the wire surface with the atomic force microscope (AFM) tip. Bending tests were performed to generate nanogaps on the wires using the nanoindenter. Direct machining techniques using a nanoindenter and an AFM should find more applications in the integration and manufacturing of micro/nanodevices.
Published in Journal of Micromechanics and Microengineering, Volume 15, Issue 3, 2005, pages 551-556.
Copyright Institute of Physics, 2005.
Li, X., Nardi, P., Baek, C.-W., Kim, J.-M., & Kim, Y.-K. "Direct Nanomechanical Machining of Gold Nanowires Using a Nanoindenter and an Atomic Force Microscope," Journal of Micromechanics and Microengineering, 15 (2005) 551-556.