Metrology in a Scanning Electron Microscope: Theoretical Developments and Experimental Validation

Author(s)

Michael A. Sutton, University of South Carolina - ColumbiaFollow
Ning Li, University of South Carolina - ColumbiaFollow
Dorian Garcia
Nicolas Cornille
Jean Jose Orteu
Stephen R. McNeil
Hubert W. Schreier
Xiaodong Li, University of South Carolina - ColumbiaFollow

Document Type

Article

Publication Info

Published in Measurement Science and Technology, Volume 17, Issue 10, 2006, pages 2613-.

©Measurement Science and Technology 2006, IOP Publishing.

Sutton, M. A., Li, N., Garcia, D., Cornille, N., Orteu, J. J., McNeil, S. R., Schreier, H. W., & Li, X. (31 August 2006). Metrology in a Scanning Electron Microscope: Theoretical Developments and Experimental Validation. Measurement Science and Technology, 17 (10), #2613. http://dx.doi.org/10.1088/0957-0233/17/10/012

Rights

©Measurement Science and Technology 2006, IOP Publishing.

Sutton, M. A., Li, N., Garcia, D., Cornille, N., Orteu, J. J., McNeil, S. R., Schreier, H. W., & Li, X. (31 August 2006). Metrology in a Scanning Electron Microscope: Theoretical Developments and Experimental Validation. Measurement Science and Technology, 17 (10), #2613. http://dx.doi.org/10.1088/0957-0233/17/10/012