Micro/Nanomechanical Characterization of Ceramic Films for Microdevices

Author(s)

Xiaodong Li, University of South Carolina - ColumbiaFollow
Bharat Bhushan

Document Type

Article

Publication Info

Published in Thin Solid Films, Volume 340, Issue 1-2, 1999, pages 210-217.

Rights

©Thin Solid Films 1999, Elsevier.

Li, D. & Bhushan, B. (26 February 1999). Micro/Nanomechanical Characterization of Ceramic Films for Microdevices. Thin Solid Films, 340 (1-2), 210 – 217. http://dx.doi.org/10.1016/S0040-6090(98)01153-5