Measurement of Fracture Toughness of Ultra-Thin Amorphous Carbon Films

Author(s)

Xiaodong Li, University of South Carolina - ColumbiaFollow
Bharat Bhushan

Document Type

Article

Publication Info

Published in Thin Solid Films, Volume 315, Issue 1-2, 1998, pages 214-221.

Rights

©Thin Solid Films 1998, Elsevier.

Li, X. & Bhushan, B. (2 March 1998). Measurement of Fracture Toughness of Ultra-Thin Amorphous Carbon Films. Thin Solid Films, 315 (1-2), 214 – 221. http://dx.doi.org/10.1016/S0040-6090(97)00788-8