Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices

Author(s)

harat Bhushan
Xiaodong Li, University of South Carolina - ColumbiaFollow

Document Type

Article

Publication Info

Published in Journal of Materials Research, Volume 12, Issue 1, 1997, pages 54-63.

Rights

©Journal of Materials Research 1997, Cambridge University Press.

Bhushan, B. & Li, X. (January 1997). Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices. Journal of Materials Research, 12 (1), 54 – 63. http://dx.doi.org/10.1557/JMR.1997.0010