Surface and Defect Correlation Studies on High Resistivity 4H SiC Bulk Crystals and Epitaxial Layers for Radiation Detectors

Document Type

Article

Subject Area(s)

Electrical Engineering, Optics

Rights

© Proceedings of SPIE 2011, Society of Photo-optical Instrumentation

Mandal, K. C., Muzykov, P. G., Krishna, R. M., & Hayes, T. C. (27 September 2011). Surface and defect correlation studies on high resistivity 4H SiC bulk crystals and epitaxial layers for radiation detectors. Proceedings of SPIE, 8142, #81420H-1-9.

http://dx.doi.org/10.1117/12.896637

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