Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices
Document Type
Article
Publication Info
Published in Journal of Materials Research, Volume 12, Issue 1, 1997, pages 54-63.
©Journal of Materials Research 1997, Cambridge University Press.
Bhushan, B. & Li, X. (January 1997). Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices. Journal of Materials Research, 12 (1), 54 – 63. http://dx.doi.org/10.1557/JMR.1997.0010
Rights
©Journal of Materials Research 1997, Cambridge University Press.
Bhushan, B. & Li, X. (January 1997). Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices. Journal of Materials Research, 12 (1), 54 – 63. http://dx.doi.org/10.1557/JMR.1997.0010