Polycrystalline Si_1-xGe_x Thin Film Deposition by Rapid Thermal Chemical Vapor Deposition, Young-Bae Park, Young-Woo Choi, Xiaodong Li
Faculty Publications

Interfacial Modification of Amorphous Substrates for Microcrystalline Silicon Growth with in situ Hydrogen Plasma Pretreatment, Young-Bae Park, Shi-Woo Rhee, Xiaodong Li
Faculty Publications

Nanomechanical Characterization of Cavity Growth and Rupture in Hydrogen-Implanted Single-Crystal BaTiO₃., Young-Bae Park, Patrick Nardi, Xiaodong Li, Harry A. Atwater
Faculty Publications

Effects of Annealing in O₂ and N₂ on the Microstructure of Metal Organic Chemical Vapor Deposition Ta₂O₅ Film and the Interfacial SiO₂ Layer, Young-Bae Park, Xiaodong Li, Gap-Jin Nam, Shi-Woo Rhee
Faculty Publications

Characterization of the Si/SiO₂ Interface Formed by Remote Plasma Enhanced Chemical Vapor Deposition from SiH₄/N₂O with or without Chlorine Addition, Young-Bae Park, Xiaodong Li, Shi-Woo Rhee
Faculty Publications

Structural Characterization of Silicon Films Deposited at Low Temperature by Remote Plasma Enhanced Chemical Vapor Deposition, Xiaodong Li, Young-Bae Park, Dong-Hwan Kim, Shi-Woo Rhee
Faculty Publications