Nano/Micro-Mechanical and Tribological Characterization of Ar, C, N, and Ne Ion-Implanted Si
Faculty Publications
Part of the Tribology Commons
Works by Xiaodong Li in Tribology
2010
2009
2008
2006
2005
1999
1998
Micro/Nanotribological Studies of Single-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices
Faculty Publications