Interfacial Modification of Amorphous Substrates for Microcrystalline Silicon Growth with in situ Hydrogen Plasma Pretreatment, Young-Bae Park, Shi-Woo Rhee, Xiaodong Li
Faculty Publications

Effects of Annealing in O₂ and N₂ on the Microstructure of Metal Organic Chemical Vapor Deposition Ta₂O₅ Film and the Interfacial SiO₂ Layer, Young-Bae Park, Xiaodong Li, Gap-Jin Nam, Shi-Woo Rhee
Faculty Publications

Structural Characterization of Silicon Films Deposited at Low Temperature by Remote Plasma Enhanced Chemical Vapor Deposition, Xiaodong Li, Young-Bae Park, Dong-Hwan Kim, Shi-Woo Rhee
Faculty Publications