Part of the Mechanical Engineering Commons

Works by Byoung-Youp Kim in Mechanical Engineering

1996

Microstructure and Deposition Rate of Aluminum Thin Films from Chemical Vapor Deposition with Dimethylethylamine alane, Byoung-Youp Kim, Xiaodong Li, Shi-Woo Rhee
Faculty Publications

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1995

Structural Characterization of Aluminum Films Deposited on Sputtered-Titanium Nitride/ Silicon Substrate by Metalorganic Chemical Vapor Deposition from Dimethylethylamine alane, Xiaodong Li, Byoung-Youp Kim, Shi-Woo Rhee
Faculty Publications

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