Mechanical characterization of Micro/Nanoscale Structures for MEMS/NEMS Applications Using Nanoindentation Techniques
Faculty Publications
Part of the Mechanical Engineering Commons
Works by Bharat Bhushan in Mechanical Engineering
2003
2002
2001
2000
1999
1998
Micro/Nanotribological Studies of Single-Crystal Silicon and Polysilicon and SiC Films for Use in MEMS Devices
Faculty Publications