Part of the Electronic Devices and Semiconductor Manufacturing Commons

Works by C. J. Metting in Electronic Devices and Semiconductor Manufacturing

2015

A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing, Johnathan K. Bunn, C. J. Metting, Jason R. Hattrick-Simpers
Faculty Publications

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