Part of the Chemical Engineering Commons

Works by Young-Bae Park in Chemical Engineering

2006

Polycrystalline Si1-xGex Thin Film Deposition by Rapid Thermal Chemical Vapor Deposition, Young-Bae Park, Young-Woo Choi, Xiaodong Li
Faculty Publications

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1996

Characterization of the Si/SiO2 Interface Formed by Remote Plasma Enhanced Chemical Vapor Deposition from SiH4/N2O with or without Chlorine Addition, Young-Bae Park, Xiaodong Li, Shi-Woo Rhee
Faculty Publications

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