Characterization of the Si/SiO₂ Interface Formed by Remote Plasma Enhanced Chemical Vapor Deposition from SiH₄/N₂O with or without Chlorine Addition, Young-Bae Park, Xiaodong Li, Shi-Woo Rhee
Faculty Publications

Structural Characterization of Aluminum Films Deposited on Sputtered-Titanium Nitride/ Silicon Substrate by Metalorganic Chemical Vapor Deposition from Dimethylethylamine alane, Xiaodong Li, Byoung-Youp Kim, Shi-Woo Rhee
Faculty Publications