A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing, Johnathan K. Bunn, C. J. Metting, Jason R. Hattrick-Simpers
Faculty Publications

Note: A Simple Thermal Gradient Annealing Unit for the Treatment of Thin Films, C. J. Metting, Johnathan K. Bunn, Ellen A. Underwood, Yihao Zhu, G. Koley, T. Crawford, Jason R. Hattrick-Simpers
Faculty Publications