Chemical Interaction of NF₃ with Si (Part II): Density Functional Calculation Studies

Author(s)

A. Endou
T. W. Little
A. Yamada
K. Teraishi
M. Kubo
Salai Cheettu Ammal, University of South Carolina - ColumbiaFollow
A. Miyamoto
M. Kitajima
F. S. Ohuchi

Document Type

Article

Subject Area(s)

Surface Science, Chemistry, Physics

Publication Info

Published in Surface Science, Volume 445, Issue 2-3, 2000, pages 243-248.

© Surface Science 2000, Elsevier

Endou, A., Little, T. W., Yamada, A., Teraishi, K., Kubo, M., Ammal, S. S. C., Miyamoto, A., Kitajima, M., & Ohuchi, F. S. (2000). Chemical interaction of NF3 with Si (Part II): Density functional calculation studies. Surface Science, 445(2-3), 243-248.

http://dx.doi.org/10.1016/S0039-6028(99)01062-6

Rights

© Surface Science 2000, Elsevier

Endou, A., Little, T. W., Yamada, A., Teraishi, K., Kubo, M., Ammal, S. S. C., Miyamoto, A., Kitajima, M., & Ohuchi, F. S. (2000). Chemical interaction of NF3 with Si (Part II): Density functional calculation studies. Surface Science, 445(2-3), 243-248.

http://dx.doi.org/10.1016/S0039-6028(99)01062-6