A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing

Author(s)

Johnathan K. Bunn, University of South Carolina - ColumbiaFollow
C. J. Metting
Jason R. Hattrick-Simpers, University of South Carolina - ColumbiaFollow

Document Type

Article

Publication Info

Published in JOM, Volume 67, Issue 1, 2015, pages 154-163.

©JOM 2015, Springer.

Bunn, J. K., Mettting, C. J., & Hattrick-Simpers, J. (1 January 2015). A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing. JOM, 67 (1), 154 – 163. http://dx.doi.org/10.1007/s11837-014-1234-2

Rights

©JOM 2015, Springer.

Bunn, J. K., Mettting, C. J., & Hattrick-Simpers, J. (1 January 2015). A Semi-Empirical Model for Tilted-Gun Planar Magnetron Sputtering Accounting for Chimney Shadowing. JOM, 67 (1), 154 – 163. http://dx.doi.org/10.1007/s11837-014-1234-2